Microstructure development of HfOx thin films
| dc.contributor.author | CHINAGLIA, ELIANE F. | |
| dc.contributor.author | AVANCI, LUIS H. | |
| dc.date.accessioned | 2019-08-19T23:47:32Z | |
| dc.date.accessioned | 2023-05-03T20:33:24Z | |
| dc.date.available | 2019-08-19T23:47:32Z | |
| dc.date.available | 2023-05-03T20:33:24Z | |
| dc.date.issued | 2015 | |
| dc.identifier.citation | CHINAGLIA, ELIANE F.; AVANCI, LUIS H.. Microstructure development of HfOx thin films. MRS Proceedings, v. 1805, p. mrss15-2135818, 2015. | |
| dc.identifier.issn | 1946-4274 | |
| dc.identifier.uri | https://hdl.handle.net/20.500.12032/88614 | |
| dc.relation.ispartof | MRS Proceedings | |
| dc.rights | Acesso Aberto | |
| dc.title | Microstructure development of HfOx thin films | pt_BR |
| dc.type | Artigo | pt_BR |
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