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Electrical characterization of vertically stacked p-FET SOI nanowires
(2018)
© 2017 Elsevier LtdThis work presents the performance and transport characteristics of vertically stacked p-type MOSFET SOI nanowires (NWs) with inner spacers and epitaxial growth of SiGe raised source/drain. The conventional ...
Methodology to separate channel conductions of two level vertically stacked SOI nanowire MOSFETs
(2018)
© 2018 Elsevier LtdThis work proposes a new method for dissociating both channel conductions of two levels vertically stacked inversion mode nanowires (NWs) composed by a Gate-All-Around (GAA) level on top of an Ω-gate ...