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In-depth low frequency noise evaluation of substrate rotation and strain engineering in N-type triple gate SOI Finfets

Doria R.T.; De Souza M.A.S.; Martino J.A.; Simoen E.; Claeys C.; Pavanello M.A. (2015)

© 2015 Elsevier B.V. All rights reserved.This work presents an experimental analysis of the low-frequency noise and the effective trap density of conventional, strained, rotated and strained-rotated SOI n-type FinFETs, ...